Auto Coating and Thin film Thickness Analyzer (TFM-500)

 


TFM-500 Series

TFM-500 Series is an auto motorized non-contact coating and thin film thickness analyzer(Reflectometer). 
TFM has a user friendly interface that enables anyone to get results easily.
*Non-contact and Non-destructive
*Simple measurement with a few buttons
*Creating a XY mapping with a few buttons
*Various substrates (wafer, glass, metal, etc.)

 

 Specifications at a glance 

*Measurement range:  0.3 ㎛ to 400 ㎛ (depending on film type)
*Measurement spot size:​ Approximately 4 mm
*Repeatability(10x): ≤ 0.001 ㎛ at 1-㎛ SiO2 on Si Wafer
*Stage size: motorized 30 x 30 cm (Other sizes are also possible.)
*Detector: 60 x 60 x 25 cm
 


 Specifications

 

TFM-500 

TFM-150N 

Thickness range

0.3 ㎛ – 100 ㎛

1 ㎛ – 400 ㎛

Wavelength range

350 ㎚ – 1,050 ㎚

750 ㎚ – 1,100 ㎚

Spot size

Approximately 4 mm

Repeatability

<± 0.001 ㎛ at 1 ㎛ SiO2 on Si wafer

Light source

Tungsten halogen 1–6 W 

Sample stage 

Motorized 30 cm x 30 cm (Standard)

Dimensions 

Stage: 60 cm x 60 cm x 25 cm

 Weight​

Approximately 20 k 

 Power​

220V / 1 A  

 


 Principle  

                                           Fig 1. Principle 1                                                                              Fig. 2. Principle 2

 

When the incident light directs light into the sample, some part of the light is reflected back from the film’s surface (reflected light 1) and some part transmits the film and is reflected back from the substrate (reflected light 2) (Fig. 1).

There are interference phenomena between the two reflected lights as shown in Fig. 2.

Fig. 2 indicates that the more the sine curves in the graph, the thicker the film.

 

  Thickness Results  

 Fig. 3. Thickness results

 

 


 Fig. 4. Repeatability (10 times)

 

 Applications