Coating and thin film thickness analyzer (TFM-100)
■ TFM-100 Series
TFM-100 Series is a non-contact coating and thin film thickness analyzer(Reflectometer). TFM has a user friendly interface that enables anyone to get results easily. *Non-contact and Non-destructive *Simple measurement with a few buttons *Various substrates (wafer, glass, metal, etc.)
Specifications at a glance
*Measurement range: 0.3 ㎛ to 500 ㎛ (depending on film type) *Measurement spot size: Approximately 4 mm (Option: 40 ㎛, 80 ㎛) *Repeatability(10x): ≤ 0.001 ㎛ at 1-㎛ SiO2 on Si Wafer *Stage size: 20 x 20 cm *Detector: 22 x 22 x 7 cm
Specifications
TFM-100
TFM-100N
Thickness range
0.3 ㎛ – 100 ㎛
1
㎛ – 500 ㎛
Wavelength range
350 ㎚ – 1,050 ㎚
750
㎚ –1,100 ㎚
Spot size
Approximately4 mm
Repeatability
0.2% or <± 0.001 ㎛ at 1 ㎛ SiO2 on Si wafer
Light source
Tungsten halogen 1–6 W
Sample
stage
20
cm x 20 cm
Dimensions
Detector: 22 cm × 22 cm × 7 cm (H)
Light source: 12 cm x 17 cm x 5 cm (H)
Stage: 20 cm x 20 cm x 17 cm (pole H)
Weight
Approximately 5 kg
Power
12
V / 1 A
Principle
Fig 1. Principle 1 Fig. 2. Principle 2
When the incident light directs light
into the sample, some part of the light is reflected back from the film’s
surface (reflected light
1) and some part transmits the film and is reflected back from the substrate
(reflected light
2) (Fig. 1).
There are interference phenomena
between the two reflected lights as shown in Fig. 2.
Fig. 2 indicates that the more the
sine curves in the graph, the thicker the film.
Thickness Results 
