Coating and thin film thickness analyzer (TFM-100)

 


TFM-100 Series

TFM-100 Series is a non-contact coating and thin film thickness analyzer(Reflectometer). 
TFM has a user friendly interface that enables anyone to get results easily.
*Non-contact and Non-destructive
*Simple measurement with a few buttons
*Various substrates (wafer, glass, metal, etc.)

 

 Specifications at a glance 

*Measurement range:  0.3 ㎛ to 400 ㎛ (depending on film type)
*Measurement spot size:​ Approximately 4 mm (Option: 40 ㎛, 80 ㎛)
*Repeatability(10x): ≤ 0.001 ㎛ at 1-㎛ SiO2 on Si Wafer
*Stage size: 20 x 20 cm
*Detector: 22 x 22 x 7 cm
 


 Specifications

 

TFM-100 

TFM-100N 

Thickness range

0.3 ㎛ – 100 ㎛

1 ㎛ – 400 ㎛

Wavelength range

350 ㎚ – 1,050 ㎚

750 ㎚ – 1,100 ㎚

Spot size

Approximately 4 mm

Repeatability

<± 0.001 ㎛ at 1 ㎛ SiO2 on Si wafer

Light source

Tungsten halogen 1–6 W 

Sample stage 

20 cm x 20 cm 

Dimensions 

Detector: 22 cm × 22 cm × 7 cm (H)
Light source: 12 cm x 17 cm x 5 cm (H)
Stage: 20 cm x 20 cm x 17 cm (pole H)

 Weight​

Approximately 5 k 

 Power​

12 V / 1 A  

 


 Principle  

                                           Fig 1. Principle 1                                                                              Fig. 2. Principle 2

 

When the incident light directs light into the sample, some part of the light is reflected back from the film’s surface (reflected light 1) and some part transmits the film and is reflected back from the substrate (reflected light 2) (Fig. 1).

There are interference phenomena between the two reflected lights as shown in Fig. 2.

Fig. 2 indicates that the more the sine curves in the graph, the thicker the film.

 

  Thickness Results  

 Fig. 3. Thickness results

 

 


 Fig. 4. Repeatability (10 times)

 

 Applications